JPH0471898U - - Google Patents

Info

Publication number
JPH0471898U
JPH0471898U JP11205490U JP11205490U JPH0471898U JP H0471898 U JPH0471898 U JP H0471898U JP 11205490 U JP11205490 U JP 11205490U JP 11205490 U JP11205490 U JP 11205490U JP H0471898 U JPH0471898 U JP H0471898U
Authority
JP
Japan
Prior art keywords
joint
resistant
heat
male
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11205490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0632556Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990112054U priority Critical patent/JPH0632556Y2/ja
Publication of JPH0471898U publication Critical patent/JPH0471898U/ja
Application granted granted Critical
Publication of JPH0632556Y2 publication Critical patent/JPH0632556Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Thermal Insulation (AREA)
  • Joints Allowing Movement (AREA)
JP1990112054U 1990-10-29 1990-10-29 高温耐熱継手 Expired - Lifetime JPH0632556Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990112054U JPH0632556Y2 (ja) 1990-10-29 1990-10-29 高温耐熱継手

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990112054U JPH0632556Y2 (ja) 1990-10-29 1990-10-29 高温耐熱継手

Publications (2)

Publication Number Publication Date
JPH0471898U true JPH0471898U (en]) 1992-06-25
JPH0632556Y2 JPH0632556Y2 (ja) 1994-08-24

Family

ID=31859555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990112054U Expired - Lifetime JPH0632556Y2 (ja) 1990-10-29 1990-10-29 高温耐熱継手

Country Status (1)

Country Link
JP (1) JPH0632556Y2 (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000349034A (ja) * 1999-03-19 2000-12-15 Applied Materials Inc シール用ｏ−リングの熱保護を改良したマイクロ波プラズマ発生装置
JP2009176612A (ja) * 2008-01-25 2009-08-06 Shin Meiwa Ind Co Ltd プラズマガン
JP2012116571A (ja) * 2012-02-02 2012-06-21 Sidel Holdings & Technology Sa 充填装置
WO2014006811A1 (ja) * 2012-07-02 2014-01-09 オイレス工業株式会社 球面排気管継手
WO2017138183A1 (ja) * 2016-02-08 2017-08-17 株式会社日立国際電気 基板処理装置、継手部および半導体装置の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54183715U (en]) * 1978-06-17 1979-12-26
JPS55149494A (en) * 1979-05-10 1980-11-20 Mitsubishi Heavy Ind Ltd Flangeeshaped pipe coupling for low temperature fluid
JPS61629U (ja) * 1984-06-04 1986-01-06 日本電気株式会社 座標入力装置
JPH0243075A (ja) * 1988-08-03 1990-02-13 Canon Inc インクジェット記録装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54183715U (en]) * 1978-06-17 1979-12-26
JPS55149494A (en) * 1979-05-10 1980-11-20 Mitsubishi Heavy Ind Ltd Flangeeshaped pipe coupling for low temperature fluid
JPS61629U (ja) * 1984-06-04 1986-01-06 日本電気株式会社 座標入力装置
JPH0243075A (ja) * 1988-08-03 1990-02-13 Canon Inc インクジェット記録装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000349034A (ja) * 1999-03-19 2000-12-15 Applied Materials Inc シール用ｏ−リングの熱保護を改良したマイクロ波プラズマ発生装置
JP2009176612A (ja) * 2008-01-25 2009-08-06 Shin Meiwa Ind Co Ltd プラズマガン
JP2012116571A (ja) * 2012-02-02 2012-06-21 Sidel Holdings & Technology Sa 充填装置
WO2014006811A1 (ja) * 2012-07-02 2014-01-09 オイレス工業株式会社 球面排気管継手
JP2014009797A (ja) * 2012-07-02 2014-01-20 Oiles Ind Co Ltd 球面排気管継手
CN104412021A (zh) * 2012-07-02 2015-03-11 奥依列斯工业株式会社 球面排气管接头
US9683687B2 (en) 2012-07-02 2017-06-20 Oiles Corporation Spherical exhaust pipe joint
WO2017138183A1 (ja) * 2016-02-08 2017-08-17 株式会社日立国際電気 基板処理装置、継手部および半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0632556Y2 (ja) 1994-08-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term